JPH031976U - - Google Patents
Info
- Publication number
- JPH031976U JPH031976U JP6273089U JP6273089U JPH031976U JP H031976 U JPH031976 U JP H031976U JP 6273089 U JP6273089 U JP 6273089U JP 6273089 U JP6273089 U JP 6273089U JP H031976 U JPH031976 U JP H031976U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- epitaxial growth
- boat
- accommodating
- liquid phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 2
- 238000000638 solvent extraction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6273089U JPH031976U (en]) | 1989-05-30 | 1989-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6273089U JPH031976U (en]) | 1989-05-30 | 1989-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031976U true JPH031976U (en]) | 1991-01-10 |
Family
ID=31592146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6273089U Pending JPH031976U (en]) | 1989-05-30 | 1989-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031976U (en]) |
-
1989
- 1989-05-30 JP JP6273089U patent/JPH031976U/ja active Pending
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